Integrated Circuits Technology (ILV)


Course lecturer:


 Ewald Wachmann
Course numberM-ISCD-1.03
Course codeTECH
Semester of degree program Semester 1
Mode of delivery Presencecourse
ECTS credits3,0
Language of instruction English

Goal of the course is to gain a solid understanding of Silicon based semiconductor devices, including the CMOS process flow, the wafer fab manufacturing process steps,as well as characterization, yield and reliability terms.

basic knowledge in physics, chemistry, mechanics and material science

The lectures provide an introduction to semiconductors and explain the fabrication facilities, the process technology steps with emphasis on CMOS technology, packaging, the fab-design interfaces as well as device reliability issues related to design.

Optionally excursions to semiconductor fabrication facilities are organized.

Course books:

- S. Wolf, Microchip Manufacturing

- S. Wolf, Silicon Processing for the VLSI Era

- S.M. Sze, Semiconductor Devices

- J.B. Kuo, CMOS VLSI Engineering

- J.D. Plummer, Silicon VLSI Technology. Fundamentals, Practice and Modeling

- J. Burghartz Guide to State-of-the-Art electronic devices

12 lecturesExamples to be calculated during lecture additional homework examples

75% final exam25% homework