Integrated Circuits Technology (ILV)




 Ewald Wachmann
Studiengangssemester 1. Semester
Semesterwochenstunden / SWS2,0
ECTS Credits3,0
Unterrichtssprache Englisch

Goal of the course is to gain a solid understanding of Silicon based semiconductor devices, including the CMOS process flow, the wafer fab manufacturing process steps,as well as characterization, yield and reliability terms.

basic knowledge in physics, chemistry, mechanics and material science

The lectures provide an introduction to semiconductors and explain the fabrication facilities, the process technology steps with emphasis on CMOS technology, packaging, the fab-design interfaces as well as device reliability issues related to design.

Optionally excursions to semiconductor fabrication facilities are organized.

Course books:

- S. Wolf, Microchip Manufacturing

- S. Wolf, Silicon Processing for the VLSI Era

- S.M. Sze, Semiconductor Devices

- J.B. Kuo, CMOS VLSI Engineering

- J.D. Plummer, Silicon VLSI Technology. Fundamentals, Practice and Modeling

- J. Burghartz Guide to State-of-the-Art electronic devices

12 lectures

Examples to be calculated during lecture

additional homework examples

75% final exam

25% homework